Xunzhao Yin
Famous AuthorPublications
LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography
As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance. However, lithography is a continuous physical process involving mask optimization, optical imaging, resist exposure, and development, which existing models fail to capture. To overcome this limitation, we present LithoDreamer, the first physics-informed World Model (WM) framework for computational lithography, which formulates the ``Layout-Mask-Resist Image-After Development Image (ADI)'' pipeline as a decision-driven multi-step evolution system. LithoDreamer captures feature changes between adjacent states to model stage-specific physics-informed latent spaces, in which it controls process intervention exploration and drives subsequent state transitions. To achieve interpretable intervention optimization without continuous supervision, we propose a contrastive variational optimization paradigm that contrasts the latent differences between intervention paths with variational evolution constraints, guiding the model to generate evolutions consistent with real lithography physics. Experiments show LithoDreamer achieves state-of-the-art performance in forward evolution and inverse planning. Our lithography dataset is publicly available at GitHub (https://github.com/7jiangyq/lithodreamer.git).
KV Packet: Recomputation-Free Context-Independent KV Caching for LLMs
Large Language Models (LLMs) rely heavily on Key-Value (KV) caching to minimize inference latency. However, standard KV caches are context-dependent: reusing a cached document in a new context requires recomputing KV states to account for shifts in attention distribution. Existing solutions such as CacheBlend, EPIC, and SAM-KV mitigate this issue by selectively recomputing a subset of tokens; however, they still incur non-negligible computational overhead (FLOPs) and increased Time-to-First-Token (TTFT) latency. In this paper, we propose KV Packet, a recomputation-free cache reuse framework that treats cached documents as immutable ``packets'' wrapped in light-weight trainable soft-token adapters, which are trained via self-supervised distillation to bridge context discontinuities. Experiments on Llama-3.1 and Qwen2.5 demonstrate that the proposed KV Packet method achieves near-zero FLOPs and lower TTFT than recomputation-based baselines, while retaining F1 scores comparable to those of the full recomputation baseline.