Haoxing Ren
Publications
Pushing the Limits of Inverse Lithography with Generative Reinforcement Learning
Inverse lithography (ILT) is critical for modern semiconductor manufacturing but suffers from highly non-convex objectives that often trap optimization in poor local minima. Generative AI has been explored to warm-start ILT, yet most approaches train deterministic image-to-image translators to mimic sub-optimal datasets, providing limited guidance for escaping non-convex traps during refinement. We reformulate mask synthesis as conditional sampling: a generator learns a distribution over masks conditioned on the design and proposes multiple candidates. The generator is first pretrained with WGAN plus a reconstruction loss, then fine-tuned using Group Relative Policy Optimization (GRPO) with an ILT-guided imitation loss. At inference, we sample a small batch of masks, run fast batched ILT refinement, evaluate lithography metrics (e.g., EPE, process window), and select the best candidate. On \texttt{LithoBench} dataset, the proposed hybrid framework reduces EPE violations under a 3\,nm tolerance and roughly doubles throughput versus a strong numerical ILT baseline, while improving final mask quality. We also present over 20\% EPE improvement on \texttt{ICCAD13} contest cases with 3$\times$ speedup over the SOTA numerical ILT solver. By learning to propose ILT-friendly initializations, our approach mitigates non-convexity and advances beyond what traditional solvers or GenAI can achieve.
LLM4Cov: Execution-Aware Agentic Learning for High-coverage Testbench Generation
Execution-aware LLM agents offer a promising paradigm for learning from tool feedback, but such feedback is often expensive and slow to obtain, making online reinforcement learning (RL) impractical. High-coverage hardware verification exemplifies this challenge due to its reliance on industrial simulators and non-differentiable execution signals. We propose LLM4Cov, an offline agent-learning framework that models verification as memoryless state transitions guided by deterministic evaluators. Building on this formulation, we introduce execution-validated data curation, policy-aware agentic data synthesis, and worst-state-prioritized sampling to enable scalable learning under execution constraints. We further curate a reality-aligned benchmark adapted from an existing verification suite through a revised evaluation protocol. Using the proposed pipeline, a compact 4B-parameter model achieves 69.2% coverage pass rate under agentic evaluation, outperforming its teacher by 5.3% and demonstrating competitive performance against models an order of magnitude larger.